Autonomous Synthesis of Two-Dimensional (2D) Materials

(ACVD-2D)

Develop an AI-enabled autonomous chemical vapor deposition (CVD) platform to establish the growth science of wafer-scale 2D semiconductors. By integrating robotics, characterization, digital twins, and self-improving AI, this thrust will enable reproducible, scalable synthesis and accelerate the discovery of growth mechanisms governing next-generation 2D electronic and quantum materials.

materials synthesis diagram

Autonomous Synthesis of Bulk Oxide Semiconductors

(AT-BuS)

Develop an autonomous thermal processing platform for the synthesis and optimization of functional bulk oxide semiconductors. Closed-loop experimentation combining robotic sample handling, AI-guided process optimization, and digital twins will accelerate the discovery of composition–processing–property relationships for advanced electronic and energy materials.

bulk oxide semiconductors graphic

Autonomous Synthesis of Oxide Thin Films

(APVD-OTF)

Develop an autonomous physical vapor deposition (PVD) platform for high-quality oxide thin films with precisely controlled composition and microstructure. AI-driven optimization and integrated characterization will enable rapid exploration of multidimensional process spaces and establish predictive synthesis strategies for functional oxide devices.

oxide thin film synthesis graphic

Autonomous Synthesis of Diamond Thin Films

(AMPCVD-DIA)

Develop an autonomous microwave plasma CVD platform to enable scalable synthesis of high-quality diamond thin films for next-generation power electronics and quantum technologies. The integration of robotics, digital twins, and self-improving AI will uncover the fundamental growth mechanisms required for reproducible, manufacturable

diamond thin films graphic